Introduction to COMSOL Multiphysics and Modeling MEMS Workshop
Tuesday July 1
18:00-20:00

Modeling and simulation of MEMS devices require software that supports a wide range of physical effects, including electrostatic, mechanical, piezoelectric, electrothermal, acoustic, and fluid–structure interaction. COMSOL Multiphysics is uniquely equipped for performing analyses across this full spectrum of phenomena essential at the microscale. In the first part of this presentation, the computational framework for model building and the modeling workflow will be discussed, including a live demonstration how to setup and solve a Multiphysics problem. In the second part of this presentation, we will describe some key features for modeling MEMS and showcase some specific examples of modeling sensors/actuators including, resonators, accelerometers, gyroscopes, surface acoustic wave (SAW) devices, and microfluidic devices.

Presenters:
Mark Cops and Akhil Vijay

COMSOL Inc.
Burlington, MA USA
info@comsol.com
www.comsol.com